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Publication name
Authors
Publication channel
Year
Publications information icon
Atomic
layer
deposition
(
ALD
) of high quality Ga2O3 thin films from a dimeric dialkylamido-bridged gallium complex
Peer-reviewed
Dezelah IV, Charles L.; Niinistö, Jaakko; Putkonen, Matti; Arstila, Kai; Winter, Charles H.; Niinist...
American Vacuum Society
2005
Publications information icon
Atomic
layer
deposition
of titanium nitride
layer
on porous silicon supercapacitor electrodes
Grigoras, Kestutis; Keskinen, J.; Yli-Rantala, Elina; Laakso, S.; Välimäki, H.; Kauranen, P.; Ahopel...
14th International Conference on Atomic
Layer
Deposition
,
ALD
2014
2014
Publications information icon
Effect of the size and reactivity of the metal reactant (MLn) on
ALD
growth
Peer-reviewed
Puurunen, Riikka
-
2002
Publications information icon
On the early history of atomic
layer
deposition
: most significant works and applications
Aarik, Jaan; Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; ...
16th International Conference on Atomic
Layer
Deposition
,
ALD
2016
2016
Publications information icon
ZrO
2
and HfO
2
Thin Films from Cyclopentadienyl Precursors by Atomic
Layer
Deposition
Peer-reviewed
Niinistö, Jaakko; Putkonen, Matti; Niinistö, Lauri
-
2003
Publications information icon
ALD
membrane strength measurement with a stylus profilometer
Gao, Feng; Puurunen, Riikka; Laukkanen, Anssi; Kilpi, Lauri; Ronkainen, Helena; Kiihamäki, Jyrki
13th International Conference on Atomic
Layer
Deposition
,
ALD
2013
2013
Publications information icon
Physical and Electrical Characterization of
ALD
Chalcogenide Materials for 3D Memory Applications
Narasimhan, Vijay; Adinolfi, V.; Cheng, L.; McBriarty, Martin E.; Utriainen, Mikko; Gao, Feng; Puuru...
19th International Conference on Atomic
Layer
Deposition
,
ALD
2019
2019
Publications information icon
Radical Surface Recombination Probabilities during Plasma
ALD
of SiO2, TiO2 and Al2O3 Determined from Film Conformality
Arts, Karsten; Utriainen, Mikko; Puurunen, Riikka L.; Kessels, Wilhelmus M.M.; Knoops, Harm C.M.
19th International Conference on Atomic
Layer
Deposition
,
ALD
2019
2019
Publications information icon
Gas and moisture barrier on bio-based packaging materials by atomic
layer
deposition
Hirvikorpi, Terhi; Vähä-Nissi, Mika; Mustonen, Tuomas; Harlin, Ali; Karppinen, Maarit
-
2010
Publications information icon
Silicon Slot Waveguides Filled with Atomic
Layer
Deposition
(
ALD
)
Peer-reviewed
Honkanen, S.; Tervonen, A.; Säynätjoki, A.; Khanna, A.; Alasaarela, T.
-
2009
Atomic
layer
deposition
(
ALD
) of high quality Ga2O3 thin films from a dimeric dialkylamido-bridged gallium complex
Peer-reviewed
2005
Atomic
layer
deposition
of titanium nitride
layer
on porous silicon supercapacitor electrodes
2014
Effect of the size and reactivity of the metal reactant (MLn) on
ALD
growth
Peer-reviewed
2002
On the early history of atomic
layer
deposition
: most significant works and applications
2016
ZrO
2
and HfO
2
Thin Films from Cyclopentadienyl Precursors by Atomic
Layer
Deposition
Peer-reviewed
2003
ALD
membrane strength measurement with a stylus profilometer
2013
Physical and Electrical Characterization of
ALD
Chalcogenide Materials for 3D Memory Applications
2019
Radical Surface Recombination Probabilities during Plasma
ALD
of SiO2, TiO2 and Al2O3 Determined from Film Conformality
2019
Gas and moisture barrier on bio-based packaging materials by atomic
layer
deposition
2010
Silicon Slot Waveguides Filled with Atomic
Layer
Deposition
(
ALD
)
Peer-reviewed
2009
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